Ultratech, Inc.
Mar 20, 2002

Ultratech Stepper Extends Commitment to Environmental, Health and Safety Program

Company's Health and Safety Incident Rates for Worker Compensation Claims Among Lowest in Electronics Industry

Throughout the entire semiconductor industry supply chain, environmental responsibility has become increasingly necessary for conducting business in today's global economy. Environmental, health and safety issues are critical in protecting employees from potentially dangerous conditions and environments, especially as the semiconductor industry faces a new set of potential risks associated with handling and manufacturing larger 300 mm wafers.

To broaden its commitment to EH&S issues, Ultratech joined the Global Care Initiative, designed to enable SEMI's diverse international membership to build new EH&S programs, or augment and strengthen their existing efforts. Established in 2000 and constructed to complement ISO standards and other industry EH&S programs, the initiative is based on five basic principles: workplace health and safety; resource conservation; product stewardship; community service; and excellence in EH&S management practices. According to Aimee Bordeaux, director of SEMI's Environment, Health and Safety Division, "Customers, regulators, employees, environmentalists and communities demand that companies understand and manage the ecological impact of their operations. Global Care affirms our belief that EH&S planning early in the process of product design, development and manufacturing adds value for customers, lowers compliance costs and creates strategic marketplace advantages."

Commenting on Ultratech's commitment to ensuring the safety of both its employees and residents of the communities in which it conducts business worldwide, Ultratech Chairman and CEO Arthur W. Zafiropoulo stated, "We pay close attention to EH&S issues to ensure the safety of our employees at our sites around the world. By augmenting our existing program with the Global Care principles, Ultratech can offer more efficient and productive manufacturing processes and support the increased development of environmentally sensible products. And by demonstrating our concern for these matters, we show our employees that their safety and that of the environment is paramount -- which contributes directly to job satisfaction and loyalty."

A critical component of Ultratech Stepper's value system is the high priority it places on ensuring employee safety -- a key reason the company ranks among the first quartile in the electronics industry for worker's compensation claims. According to Kimberly Armanasco, regional executive, risk consulting for Royal & SunAlliance Insurance Company, "Ultratech Stepper's commitment to worker safety is evidenced by its total recordable case incidence rate, which consistently falls below the mean. While other companies in the industry average five injuries per 100 full-time equivalents, Ultratech Stepper is one of the few companies whose injury rate averages two injuries per 100 full-time equivalents."

Certain of the statements contained herein may be considered forward-looking statements under Section 27A of the Securities Act of 1933, as amended, and Section 21E of the Securities Exchange Act of 1934, as amended, that involve risks and uncertainties, such as the cyclicality in the nanotechnology and semiconductor industries, delays, deferrals and cancellations of orders by customers, pricing pressures, competition, lengthy sales cycles for the company's systems, ability to volume produce systems and meet customer requirements, the mix of products sold, dependence on new product introductions and commercial success of any new products, integration and development of the Verdant operation, sole or limited sources of supply, international sales, customer concentration, manufacturing inefficiencies and absorption levels, risks associated with introducing new technologies, inventory obsolescence, economic and political conditions in Asia, delays in collecting accounts receivable, extended payment terms, changes in technologies, and any adverse effects of the recent terrorist attacks in the United States on the economy in general or our business in particular. Such risks and uncertainties are described in the company's SEC reports including the company's Annual Report on Form 10-K filed as of December 31, 2000, and form 10-Q filed as of September 30, 2001.

About Ultratech: Founded in 1979, Ultratech Stepper, Inc. designs, manufactures and markets photolithography equipment used worldwide in the fabrication of semiconductor and nanotechnology devices. The company produces products designed to substantially reduce the cost of ownership for manufacturers in the electronics industry. The company's home page on the World Wide Web is located at www.ultratech.com.

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SOURCE Ultratech Stepper, Inc.

CONTACT:          Bruce R. Wright, Senior Vice President & CFO, or
                  Laura Rebouche, Vice President, Investor Relations and Corporate
                  Communications, lrebouche@corp.ultratech.com, both of Ultratech Stepper, Inc.,
                  +1-408-321-8835, or fax, +1-408-577-3379; or Dori Jones, Account Director of
                  MCA, +1-650-968-8900, or fax, +1-650-968-8990, or djones@mcapr.com, for
                  Ultratech Stepper, Inc.


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